NeoDry E Series Compact & Air Cooled Dry Pump
| Model | Max. pumping speed | Ultimate pressure |
|---|---|---|
| NeoDry7E | 110L/min (7m3/h) | 0.05mbar(5.0Pa) |
| NeoDry15E | 250L/min (15m3/h) | 0.01mbar(1.0Pa) |
| NeoDry30E | 500L/min (30m3/h) | |
| NeoDry36E | 600L/min (36m3/h) | |
| NeoDry60E | 1,000L/min (60m3/h) | |
| NeoDry100E | 1,670L/min (100m3/h) | 0.02mbar(2.0Pa) |
| NeoDry300E | 5,000L/min (300m3/h) | 0.003mbar(0.3Pa) |
NeoDry G Series Premium version of NeoDry
| Model | Max. pumping speed | Ultimate pressure |
|---|---|---|
| NeoDry7G | 110L/min (7m3/h) | 0.05mbar(5.0Pa) |
| NeoDry15G | 250L/min (15m3/h) | 0.01mbar(1.0Pa) |
| NeoDry30G | 500L/min (30m3/h) | |
| NeoDry36G | 600L/min (36m3/h) | 0.007mbar(0.7Pa) |
MU-XE/GX Series Energy Saving, Compact & Water cooled Dry Pump
| Model | Max. pumping speed | Ultimate pressure |
|---|---|---|
| MU100XE | 1,660L/min (100m3/h) | 0.015mbar(1.5Pa) |
| MU180GX | 3,000L/min (180m3/h) | |
| MU300XE | 5,000L/min (300m3/h) | 0.005mbar(0.5Pa) |
| MU600XE | 10,000L/min (600m3/h) | |
| MU1200XE | 20,000L/min (1,200m3/h) |
MUP-E Series For Medium Processes
| Model | Max. pumping speed | Ultimate pressure |
|---|---|---|
| MUP600E | 10,000L/min (600m3/h) | 0.005mbar(0.5Pa) |
| MUP1200E | 19,000L/min (1,140m3/h) | |
| MUP1800E | 30,000L/min (1,800m3/h) |
SD Series For Harsh Processes (SDX) & Ultra-harsh Processes (SDT)
| Model | Max. pumping speed | Ultimate pressure |
|---|---|---|
| SDX600 | 10,000L/min (600m3/h) | 0.005mbar(0.5Pa) |
| SDT600 | 10,000L/min (600m3/h) | |
| SDX1200 | 18,000L/min (1,080m3/h) | |
| SDT1200 | 19,000L/min (1,140m3/h) | |
| SDX1800 | 30,000L/min (1,800m3/h) | 0.003mbar(0.3Pa) |
| SDT1800 |
Select a Right Pump
for the Application
General Industry
NeoDry E Series NeoDry G Series
Air Cooled Vacuum Pump for Low Cost of Ownership, Long Life & Maintenance Cycle. Fit right in for Industrial Application such as Analytical, R&D Laboratory Equipment.
Light Process Application
MU-XE/GX Series
The Industry's Smallest Pump with the lowest power consumption. On Board Pump, Ideal for Installing in any Tools.
Medium Process Application
MUP-E Series
This concept will be a solution for customers prioritizing energy-saving in medium processes such as PVD, Ashing, Oxide Etching and Poly Etching.
Spec. & name of products are subject to change without prior notice.




