Products

NeoDry E Series  Compact & Air Cooled Dry Pump

Model Max. pumping speed Ultimate pressure
NeoDry7E 110L/min (7m3/h) 0.05mbar(5.0Pa)
NeoDry15E 250L/min (15m3/h) 0.01mbar(1.0Pa)
NeoDry30E 500L/min (30m3/h)
NeoDry36E 600L/min (36m3/h)
NeoDry60E 1,000L/min (60m3/h)
NeoDry100E 1,670L/min (100m3/h) 0.02mbar(2.0Pa)
NeoDry300E 5,000L/min (300m3/h) 0.003mbar(0.3Pa)

NeoDry G Series  Premium version of NeoDry

Model Max. pumping speed Ultimate pressure
NeoDry7G 110L/min (7m3/h) 0.05mbar(5.0Pa)
NeoDry15G 250L/min (15m3/h) 0.01mbar(1.0Pa)
NeoDry30G 500L/min (30m3/h)
NeoDry36G 600L/min (36m3/h) 0.007mbar(0.7Pa)

MU-XE/GX Series  Energy Saving, Compact & Water cooled Dry Pump

Model Max. pumping speed Ultimate pressure
MU100XE 1,660L/min (100m3/h) 0.015mbar(1.5Pa)
MU180GX 3,000L/min (180m3/h)
MU300XE 5,000L/min (300m3/h) 0.005mbar(0.5Pa)
MU600XE 10,000L/min (600m3/h)
MU1200XE 20,000L/min (1,200m3/h)

MUP-E Series  For Medium Processes

Model Max. pumping speed Ultimate pressure
MUP600E 10,000L/min (600m3/h) 0.005mbar(0.5Pa)
MUP1200E 19,000L/min (1,140m3/h)
MUP1800E 30,000L/min (1,800m3/h)

SD Series  For Harsh Processes (SDX) & Ultra-harsh Processes (SDT)

Model Max. pumping speed Ultimate pressure
SDX600 10,000L/min (600m3/h) 0.005mbar(0.5Pa)
SDT600 10,000L/min (600m3/h)
SDX1200 18,000L/min (1,080m3/h)
SDT1200 19,000L/min (1,140m3/h)
SDX1800 30,000L/min (1,800m3/h) 0.003mbar(0.3Pa)
SDT1800

Select a Right Pump
for the Application

General Industry

NeoDry E Series NeoDry G Series

Air Cooled Vacuum Pump for Low Cost of Ownership, Long Life & Maintenance Cycle. Fit right in for Industrial Application such as Analytical, R&D Laboratory Equipment.

Light Process Application

MU-XE/GX Series

The Industry's Smallest Pump with the lowest power consumption. On Board Pump, Ideal for Installing in any Tools.

Medium Process Application

MUP-E Series

This concept will be a solution for customers prioritizing energy-saving in medium processes such as PVD, Ashing, Oxide Etching and Poly Etching.

Harsh/Ultra-harsh Process Application

SD Series

Further strengthened process tolerance owing to vertical screw design, wide range of temperature variations and new heater system.

Spec. & name of products are subject to change without prior notice.