- Further strengthened process tolerance owing to vertical screw design,
wide range of temperature variations and new heater system - 45% smaller footprint for 19,000 L/min class compared to our conventional models
Harsh process application example
| Model*1 | SDX600 | SDT600 | SDX1200 | SDT1200 | SDX1800 | SDT1800 | |
| Max. pumping speed [L/min]*2 | 10,000 | 18,000 | 19,000 | 30,000 | |||
| Ultimate pressure1*2 | [mbar] | 0.005 | 0.003 | ||||
| [Pa] | 0.5 | 0.3 | |||||
| N2 purge [SLM] | 0~80 | ||||||
| Cooling water [L/min] | 3.0 | 4.0 | 3.0 | 4.0 | 3.0 | 4.0 | |
| Supply Voltage | 200V Model | 3Ph, 200 ～ 220V, 50/60Hz (Allowable voltage fluctuation ±10%) | |||||
| 400V Model | 3Ph, 380 ～ 440V, 50/60Hz (Allowable voltage fluctuation ±10%) | ||||||
| Power consumption [kW]*3 | 1.5 | 3.0 | 1.65 | 3.15 | 2.1 | 3.3 | |
| Dimensions [mm]*4 | L | 695 | 695 | 850 | |||
| W | 285 | 285 | 380 | ||||
| H | 850 | 850 | 950 | ||||
1) SDX energy-saving and harsh process-compatible machines, SDT process-resistant and ultra-harsh process-compatible machines 2) Values without N2 purge
3) Approximate value at ultimate pressure. 4) Package dimensions. Please contact us for further details.
Specifications and model names are subject to change without prior notice. Please contact us for information on compatible gases.
3) Approximate value at ultimate pressure. 4) Package dimensions. Please contact us for further details.
Specifications and model names are subject to change without prior notice. Please contact us for information on compatible gases.
