MUP-E Series

For medium processes

Key features

EXCELLENT ENERGY SAVINGS OWING TO THE UNIQUE ROTOR DESIGN, EFFICIENT INVERTER AND SYNCHRONOUS MOTOR EXTREMELY SMALL FOOT PRINT FOR BETTER USABILITY AT CUSTOMER APPLICATION APPLICABLE FOR VARIOUS TOOLS/EQUIPMENTS BEST FOR CLEAN PUMPING SUCH AS L/L AND TRANSFER CHAMBER ETCEXCELLENT ENERGY SAVINGS OWING TO THE UNIQUE ROTOR DESIGN, EFFICIENT INVERTER AND SYNCHRONOUS MOTOR EXTREMELY SMALL FOOT PRINT FOR BETTER USABILITY AT CUSTOMER APPLICATION APPLICABLE FOR VARIOUS TOOLS/EQUIPMENTS BEST FOR CLEAN PUMPING SUCH AS L/L AND TRANSFER CHAMBER ETC

Specifications

ModelMUP600EMUP1200EMUP1800E
Max. pumping speed [L/min]*110,00019,00030,000
Ultimate pressure1*1[mbar]0.005
[Pa]0.5
N2 purge [SLM]0~45
Power supply200V Model3Ph, 200 ～ 220V, 50/60Hz (Allowable voltage fluctuation ±10%)
400V Model3Ph, 380 ～ 440V, 50/60Hz (Allowable voltage fluctuation ±10%)
Cooling water [L/min]2.0
Power consumption [kW]*20.80.951.1
Dimensions [mm]*3L695850
W285380
H655950
1) Values without N2 purge 2) Approximate value at ultimate pressure. 3) Package dimensions. Contact us for further details.

SP Curves

MU-X Series S-P Curve

  1. Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice.
  2. Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department.
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